CSOT T2 PH3 MASK Alarm

CSOT-T2-PH3——Mask:

警报代码英文名称中文名称故障起因故障排除故障备注
F001 EMERGENCY STOP 紧急停止 检查各单元的紧急停止按钮 排除被按下原因后,旋转各单元的紧急停止按钮恢复 需重通电开机
F002 MAIN AIR PRESSURE DOWN 主回路着AIR气压低 确认一次测AIR供压 排除原因后Rest Alarm复机
F003
F004
F005 R/B ROOM KEY SW OFF 机械手安全门钥匙打开
F006 R/B ROOM SAFETY DOOR OPEN 机械手安全门打开
F007 MANUAL INSP.DOOR OPEN 手动检查部安全门打开
F008 MANUAL INSP.SAFETY PLUG PULLED ON 手动检查部安全销拔出
F009
F010
F011
F012
F013 CC-LINK ALARM CC-LINK 网络通讯断线
F014
F015
F016
F017 SPIN UNIT LEAK 清洗部发生漏液
F018 TANK UNIT LEAK 药液槽发生漏液
F019 LD UV COOLANT LEAK 装载/卸载部发生漏液
F020
F021
F022
F023
F024
F025 EXHAUST FAN OVER LOAD 排气风扇损坏
F026 EXHAUST FAN INVERTER ALARM 排气风机变频器报警
F027 EXHAUST PRESSURE DOWN 排气风扇压力低
F028
F029
F030
F031
F032
F033 ROBOT MASK SET MISS
F034 LD/ULD MASK SET MISS
F035 UV MASK SET MISS
F036 ALIGNMENT MASK SET MISS
F037 WASH MASK SET MISS
F038 MANUAL INSP.MASK SET MISS
F039
F040
F041
F042
F043
F044
F045
F046
F047
F048
F049 ROBOT MASK DET.SENSOR ALARM
F050 LD/ULD MASK DET.SENSOR ALARM
F051 UV MASK DET.SENSOR ALARM
F052 ALIGNMENT MASK DET.SENSOR ALARM
F053 WASH MASK DET.SENSOR ALARM
F054 MANUAL INSP.MASK DET.SENSOR ALARM
F055
F056
F057
F058
F059
F060
F061
F062
F063
F064
F065 RET.TO HOME T/O
F066
F067 LOADER UV POWER SAFETY RELAY ALARM
F068 ROBOT POWER SAFETY RELAY ALARM
F069 SPIN POWER SAFETY RELAY ALARM
F070 INSPECTION POWER SAFETY RELAY ALARM
F071 HEATER POWER SAFETY RELAY ALARM
F072
F073
F074
F075
F076
F077
F078
F079
F080
F081 ROBOT2 T/O
F082 ROBOT CONTROLLER ERROR
F083 ROBOT CAN NOT TURN ON
F084 ROBOT CAN NOT TAKE OUT
F085
F086 ROBOT SERVO OFF
F087
F088
F089
F090
F091
F092
F093
F094
F095
F096
F097 STOCKER1 ROBOT OVERRUN
F098 STOCKER2 ROBOT OVERRUN
F099 STOCKER3 ROBOT OVERRUN
F100 STOCKER4 ROBOT OVERRUN
F101 STOCKER5 ROBOT OVERRUN
F102 STOCKER6 ROBOT OVERRUN
F103 STOCKER7 ROBOT OVERRUN
F104 STOCKER8 ROBOT OVERRUN
F105
F106
F107
F108
F109
F110
F111
F112 ROBOT HAND STOCKER DOWN OVERRUN
F113 STOCKER1 ROBOT INTERFERENCE
F114 STOCKER2 ROBOT INTERFERENCE
F115 STOCKER3 ROBOT INTERFERENCE
F116 STOCKER4 ROBOT INTERFERENCE
F117 STOCKER5 ROBOT INTERFERENCE
F118 STOCKER6 ROBOT INTERFERENCE
F119 STOCKER7 ROBOT INTERFERENCE
F120 STOCKER8 ROBOT INTERFERENCE
F121
F122
F123
F124
F125
F126
F127
F128
F129 UV LOCK SENSOR ALARM
F130 UV LOCK TIME OVER
F131 UV C/V TIME OVER
F132 UV C/V INV ALARM
F133 UV C/V OVER LOAD
F134 UV C/V PASSING ALARM
F135
F136 UV UNIT LIFTING SENSOR ALARM
F137 UV UNIT LIFTING TIME OVER
F138 UV UNIT OPEN
F139
F140
F141 UV N2 FLOWWING QUANTITY ALARM
F142 UV COOLING IN FLOW ALARM
F143 UV UNIT CDA SUPPLY FLOW ALARM
F144
F145
F146 UV C/V MASK AGROUND
F147
F148
F149 UV RESPONSE TIME OVER
F150
F151 UV UNIT LEAK DET
F152 UV UNIT ANOMALOUS HEATING ALARM
F153 UV NOT LIGHTING ALARM
F154 UV UNIT STATUS ALM
F155
F156
F157
F158 UV UNIT EXHAUST PRESSURE ALARM
F159 TANK UNIT EXHAUST PRESSURE ALARM
F160
F161 SPIN ROT.QD75 ALARM
F162 SPIN ROT.QD75 WARNING
F163 SPIN ROT.DRIVER ALARM
F164 SPIN ROT.RESISTANCE ALARM
F165 SPIN ROT.T/O
F166
F167
F168 SPIN ROT.POS.SENSOR ALARM
F169 SPIN LIFT2 T/O
F170 SPIN LIFT SENSOR ALARM
F171
F172
F173 SPIN LOCK T/O
F174 SPIN LOCK SENSOR ALARM
F175
F176
F177 RINSE/N LIFT2 T/O
F178 RINSE/N LIFT SENSOR ALARM
F179
F180
F181
F182
F183
F184
F185 RINSE SWING T/O
F186 RINSE SWING SENSOR ALARM
F187 RINSE SWING INV ALARM
F188 RINSE SWING FWD O/R
F189 RINSE SWING REV O/R
F190 RINSE SWING AREA ALARM
F191
F192
F193 BRUSH LIFT QD75 ALARM
F194 BRUSH LIFT QD75 WARNING
F195 BRUSH LIFT DRIVER ALARM
F196 BRUSH LIFT DRIVER WARNING
F197 BRUSH LIFT2 T/O
F198 BRUSH LIFT UP O/R
F199 BRUSH LIFT DOWN O/R
F200 BRUSH LIFT POS.DET.SENSOR ALARM
F201 BRUSH SWING QD75 ALARM
F202 BRUSH SWING QD75 WARNING
F203 BRUSH SWING DRIVER ALARM
F204 BRUSH SWING DRIVER WARNING
F205 BRUSH SWING TIMEOVER
F206 BRUSH SWING ADV.O/R
F207 BRUSH SWING RET.O/R
F208 BRUSH SWING POS.DET.SENSOR ALARM
F209 BRUSH SWING AREA ALARM
F210 BRUSH ROTATION INVERTER ALARM
F211
F212
F213
F214
F215
F216
F217 N2 SWING TIMEOVER
F218 N2 SWING SENSOR ALARM
F219 N2 SWING INV ALARM
F220 N2 SWING FWD O/R
F221 N2 SWING REV O/R
F222 N2 SWING AREA ALARM
F223
F224
F225 INSP.TURN QD75 ALARM
F226 INSP.TURN QD75 WARNING
F227 INSP.TURN DRIVER ALARM
F228 INSP.TURN DRIVER WARNING
F229 INSP.TURN TIMEOVER
F230 INSP.TURN FWD O/R
F231 INSP.TURN REV O/R
F232 INSP.TURN SENSOR ALARM
F233
F234
F235
F236
F237 INSPECTION SHUTTER SENSOR ALARM
F238 INSPECTION SHUTTER TIMEOVER
F239 INSPECTION AREA SENSOR
F240
F241 INSPECTION LIFTER QD75 ALARM
F242 INSPECTION LIFTER QD75 WARNING
F243 INSPECTION LIFTER DRIVER ALARM
F244 INSPECTION LIFTER DRIVER WARNING
F245 INSPECTION LIFTER TIMEOVER
F246 INSPECTION lIFTER UP OVER RUN
F247 INSPECTION LIFTER DOWN OVER RUN
F248 INSPECTION LIFTER SENSOR ALARM
F249
F250
F251
F252
F253
F254
F255
F256
F257 LD/ULD POSITIONING T/O
F258 LD/ULD POSITIONING SENSOR ALARM
F259 LD/ULD OPNER T/O
F260 LD/ULD OPENER SENSOR ALARM
F261 LD/ULD COVER OPEN MISS
F262 LD/ULD CASE PROTRUDE
F263 LD/ULD CASE DIFFERENT
F264
F265
F266
F267
F268
F269
F270
F271
F272
F273
F274
F275
F276
F277
F278
F279
F280
F281
F282
F283
F284
F285
F286
F287
F288
F289 ALIGNMENT POSITIONING1 T/O
F290 ALIGNMENT POSITIONING1 SENSOR ALARM
F291 ALIGNMENT POSITIONING2 T/O
F292 ALIGNMENT POSITIONING2 SENSOR ALARM
F293
F294
F295
F296
F297 MASK FACE FRONT/BACK MISSMATCH
F298
F299
F300
F301
F302
F303
F304
F305
F306
F307
F308
F309
F310
F311
F312
F313
F314
F315
F316
F317
F318
F319
F320
F321
F322
F323
F324
F325
F326
F327
F328
F329
F330
F331
F332
F333 SCRUB TANK LEVEL LOW
F334
F335
F336
F337 UPPER RINSE FLOW ALARM
F338
F339 BACK RINSE FLOW ALARM
F340 SCRUB FLOW ALARM
F341 UPPER N2 FLOW ALARM
F342 LOWER N2 FLOW ALARM
F343 IONIZER AIR FLOW ALARM
F344
F345 BRUSH DIW FLOW ALARM
F346 BRUSH DETERGENT FLOW ALARM
F347 AIR PRESSURE ALARM
F348 AIR FLOW ALARM
F349
F350
F351
F352
F353
F354
F355
F356
F357
F358
F359
F360
F361
F362
F363
F364
F365
F366
F367
F368
F369
F370
F371
F372
F373
F374
F375
F376
F377
F378
F379
F380
F381
F382
F383
F384
F385 INSPECTION HAND TIMEOVER
F386 INSPECTION HAND INVERTER ALARM
F387
F388
F389
F390 INSPECTION HAND CLOSE OVER RUN
F391 INSPECTION HAND OPEN OVER RUN
F392 INSPECTION HAND SENSOR ALARM
F393
F394
F395
F396
F397
F398
F399
F400
F401
F402
F403
F404
F405
F406
F407
F408
F409
F410
F411
F412
F413
F414
F415
F416
F417 PLC BATTERY LOW
F418 CC-LINK IE ALARM
F419 ANALOG UNIT ALARM
F420
F421 BCR T/O
F422 BCR READ NG
F423 BCR ERROR
F424
F425 PC DOWN
F426 PC CONNECT REQUEST NG
F427 PC PROCESS END REQUEST NG
F428
F429 REPAIR EMO
F430 HEPA ALARM
F431 MAIN N PRESSURE ALARM
F432 TOUCH PANEL STOP SWITCH
F433 LD IONIZER RUN ALARM
F434 LD IONAIZER TIP CLEANING ALARM
F435 LD IONAIZER HIGH VOLTAGE ALARM
F436
F437
F438
F439
F440
F441
F442
F443
F444
F445
F446
F447
F448
F449 MIXING TANK SENSOR ALARM
F450 MIXING TANK LEVEL HH
F451 MIXING TANK LEVEL LL
F452
F453 MIXING TANK HEATER BURNOUT
F454 MIXING TANK HEATER OVERHEAT
F455 MIXING TANK TEMP.ALARM
F456 MIXING TANK PUMP OVERLOAD
F457 WEIGHT BOTTLE SENSOR ALARM
F458 CCSS WEIGHT BOTTLE LEVEL HH
F459
F460 CHEMICAL SUPPLY READY OFF
F461 CHEMICAL SUPPLY T/O
F462 DIW SUPPLY T/O
F463 MAKE DETERGENT2 T/O
F464
F465 LD/ULD AREA SENSOR
F466 LD/ULD CASE REQ.
F467
F468
F469
F470
F471
F472
F473 MANUAL INSP.AREA SENSOR
F474
F475
F476
F477
F478
F479
F480
F481 INSPECTION DOOR OPEN
F482
F483
F484
F485
F486
F487
F488
F489 MAIN RECIPE SETTING NG
F490 WASH RECIPE SETTING NG
F491 RESERVE EDIT STEP ALARM
F492 RESERVE EDIT LD SET CALL
F493
F494
F495
F496
F497 SHORTAGE OF CAPACITY OF HARD DISK WARNING
F498 PC ALARM2
F499 PC ALARM3
F500 PC ALARM4
F501 PC ALARM5
F502 PC ALARM6
F503 PC ALARM7
F504 PC ALARM8
F505 PC ALARM9
F506 PC ALARM10
F507 PC ALARM11
F508 PC ALARM12
F509 PC ALARM13
F510 PC ALARM14
F511 PC ALARM15
F512 PC ALARM16
F513 STOCKER1-1 MASK DET.ALARM
F514 STOCKER1-2 MASK DET.ALARM
F515 STOCKER1-3 MASK DET.ALARM
F516 STOCKER1-4 MASK DET.ALARM
F517 STOCKER1-5 MASK DET.ALARM
F518 STOCKER1-6 MASK DET.ALARM
F519 STOCKER1-7 MASK DET.ALARM
F520 STOCKER1-8 MASK DET.ALARM
F521 STOCKER1-9 MASK DET.ALARM
F522 STOCKER1-10 MASK DET.ALARM
F523 STOCKER1-11 MASK DET.ALARM
F524 STOCKER1-12 MASK DET.ALARM
F525 STOCKER1-13 MASK DET.ALARM
F526 STOCKER1-14 MASK DET.ALARM
F527 FSTOCKER1-15 MASK DET.ALARM
F528
F529 STOCKER2-1 MASK DET.ALARM
F530 STOCKER2-2 MASK DET.ALARM
F531 STOCKER2-3 MASK DET.ALARM
F532 STOCKER2-4 MASK DET.ALARM
F533 STOCKER2-5 MASK DET.ALARM
F534 STOCKER2-6 MASK DET.ALARM
F535 STOCKER2-7 MASK DET.ALARM
F536 STOCKER2-8 MASK DET.ALARM
F537 STOCKER2-9 MASK DET.ALARM
F538 STOCKER2-10 MASK DET.ALARM
F539 STOCKER2-11 MASK DET.ALARM
F540 STOCKER2-12 MASK DET.ALARM
F541 STOCKER2-13 MASK DET.ALARM
F542 STOCKER2-14 MASK DET.ALARM
F543 STOCKER2-15 MASK DET.ALARM
F544
F545 STOCKER3-1 MASK DET.ALARM
F546 STOCKER3-2 MASK DET.ALARM
F547 STOCKER3-3 MASK DET.ALARM
F548 STOCKER3-4 MASK DET.ALARM
F549 STOCKER3-5 MASK DET.ALARM
F550 STOCKER3-6 MASK DET.ALARM
F551 STOCKER3-7 MASK DET.ALARM
F552 STOCKER3-8 MASK DET.ALARM
F553 STOCKER3-9 MASK DET.ALARM
F554 STOCKER3-10 MASK DET.ALARM
F555 STOCKER3-11 MASK DET.ALARM
F556 STOCKER3-12 MASK DET.ALARM
F557 STOCKER3-13 MASK DET.ALARM
F558 STOCKER3-14 MASK DET.ALARM
F559 STOCKER3-15 MASK DET.ALARM
F560
F561 STOCKER4-1 MASK DET.ALARM
F562 STOCKER4-2 MASK DET.ALARM
F563 STOCKER4-3 MASK DET.ALARM
F564 STOCKER4-4 MASK DET.ALARM
F565 STOCKER4-5 MASK DET.ALARM
F566 STOCKER4-6 MASK DET.ALARM
F567 STOCKER4-7 MASK DET.ALARM
F568 STOCKER4-8 MASK DET.ALARM
F569 STOCKER4-9 MASK DET.ALARM
F570 STOCKER4-10 MASK DET.ALARM
F571 STOCKER4-11 MASK DET.ALARM
F572 STOCKER4-12 MASK DET.ALARM
F573 STOCKER4-13 MASK DET.ALARM
F574 STOCKER4-14 MASK DET.ALARM
F575 STOCKER4-15 MASK DET.ALARM
F576
F577 STOCKER5-1 MASK DET.ALARM
F578 STOCKER5-2 MASK DET.ALARM
F579 STOCKER5-3 MASK DET.ALARM
F580 STOCKER5-4 MASK DET.ALARM
F581 STOCKER5-5 MASK DET.ALARM
F582 STOCKER5-6 MASK DET.ALARM
F583 STOCKER5-7 MASK DET.ALARM
F584 STOCKER5-8 MASK DET.ALARM
F585 STOCKER5-9 MASK DET.ALARM
F586 STOCKER5-10 MASK DET.ALARM
F587 STOCKER5-11 MASK DET.ALARM
F588 STOCKER5-12 MASK DET.ALARM
F589 STOCKER5-13 MASK DET.ALARM
F590 STOCKER5-14 MASK DET.ALARM
F591 STOCKER5-15 MASK DET.ALARM
F592
F593 STOCKER6-1 MASK DET.ALARM
F594 STOCKER6-2 MASK DET.ALARM
F595 STOCKER6-3 MASK DET.ALARM
F596 STOCKER6-4 MASK DET.ALARM
F597 STOCKER6-5 MASK DET.ALARM
F598 STOCKER6-6 MASK DET.ALARM
F599 STOCKER6-7 MASK DET.ALARM
F600 STOCKER6-8 MASK DET.ALARM
F601 STOCKER6-9 MASK DET.ALARM
F602 STOCKER6-10 MASK DET.ALARM
F603 STOCKER6-11 MASK DET.ALARM
F604 STOCKER6-12 MASK DET.ALARM
F605 STOCKER6-13 MASK DET.ALARM
F606 STOCKER6-14 MASK DET.ALARM
F607 STOCKER6-15 MASK DET.ALARM
F608
F609 STOCKER7-1 MASK DET.ALARM
F610 STOCKER7-2 MASK DET.ALARM
F611 STOCKER7-3 MASK DET.ALARM
F612 STOCKER7-4 MASK DET.ALARM
F613 STOCKER7-5 MASK DET.ALARM
F614 STOCKER7-6 MASK DET.ALARM
F615 STOCKER7-7 MASK DET.ALARM
F616 STOCKER7-8 MASK DET.ALARM
F617 STOCKER7-9 MASK DET.ALARM
F618 STOCKER7-10 MASK DET.ALARM
F619 STOCKER7-11 MASK DET.ALARM
F620 STOCKER7-12 MASK DET.ALARM
F621 STOCKER7-13 MASK DET.ALARM
F622 STOCKER7-14 MASK DET.ALARM
F623 STOCKER7-15 MASK DET.ALARM
F624
F625 STOCKER8-1 MASK DET.ALARM
F626 STOCKER8-2 MASK DET.ALARM
F627 STOCKER8-3 MASK DET.ALARM
F628 STOCKER8-4 MASK DET.ALARM
F629 STOCKER8-5 MASK DET.ALARM
F630 STOCKER8-6 MASK DET.ALARM
F631 STOCKER8-7 MASK DET.ALARM
F632 STOCKER8-8 MASK DET.ALARM
F633 STOCKER8-9 MASK DET.ALARM
F634 STOCKER8-10 MASK DET.ALARM
F635 STOCKER8-11 MASK DET.ALARM
F636 STOCKER8-12 MASK DET.ALARM
F637 STOCKER8-13 MASK DET.ALARM
F638 STOCKER8-14 MASK DET.ALARM
F639 STOCKER8-15 MASK DET.ALARM
F640
F641
F642
F643
F644
F645
F646
F647
F648
F649
F650
F651
F652
F653
F654
F655
F656
F657
F658
F659
F660
F661
F662
F663
F664
F665
F666
F667
F668
F669
F670
F671
F672
F673
F674
F675
F676
F677
F678
F679
F680
F681
F682
F683
F684
F685
F686
F687
F688
F689 T1 T/O 17 Recipe Modify Report
F690 T1 T/O 18 Port Down Report
F691 T1 T/O 19 VCR Event Report
F692 T1 T/O 20 Job Data Edit
F693 T1 T/O 21 Mask Status Report
F694
F695
F696
F697
F698
F699
F700
F701
F702
F703
F704
F705
F706
F707 T1 TIME OUT 3 Receive Job Data Report#
F708 T1 TIME OUT 4 Send Out Job Data Report#
F709 T1 TIME OUT 5 Store Job Data Report
F710 T1 TIME OUT 6 Fetch Out Job Data Report
F711 T1 TIME OUT 7 Remove Job Data Report
F712 T1 TIME OUT 8 Current Recipe ID Change Report
F713 T1 TIME OUT 9 Mask End Report
F714 T1 TIME OUT 10 Process Data Report
F715 T1 TIME OUT 11 CIM Message Confirm Report
F716 T1 TIME OUT 12 Alarm Status Change Report
F717 T1 TIME OUT 13 Mask Start Report
F718 T1 TIME OUT 14 Mask End Report
F719 T1 TIME OUT 15 Equipment Operation Mode Report
F720 T1 TIME OUT 16 Job Data Request Report
F721 T1 TIME OUT 17 Downstream Inline signal off
F722 T1 TIME OUT 18 Upstream Inline signal off
F723
F724
F725
F726 Tank Out Receive Time Over
F727 Received Job NG
F728 Equipment Status Change Stop
F729 Job Duplicate Check NG
F730
F731
F732
F733
F734
F735
F736
F737 BC Status Check Timeout
F738 MPLC Status Check Timeout
F739 T1 Send Wait Time Over
F740 T1 Send Interval Time Out
F741 T1 Receive Time Over
F742
F743
F744
F745
F746
F747
F748 Equipment Status Change Setup
F749 Equipment Status Change Stop
F750 Equipment Status Change Pause
F751
F752
F753 T2 T/O 1 CIM Mode Change Command
F754 T2 T/O 2 Recipe Register Validation Command
F755 T2 T/O 3 Recipe Parameter Request Command
F756 T2 T/O 4 Date Time Set Command
F757 T2 T/O 5 CIM Message Set Command
F758 T2 T/O 6 CIM Message Clear Command
F759 T2 T/O 7 Equipment Status Stop Command
F760 T2 T/O 8 Process Pause Command Reply
F761 T2 T/O 9 VCR Enable Mode Change Command Reply
F762 T2 T/O 10 Process Data Request Command Reply
F763 T2 T/O 11 Job Remove Recovery Command Reply
F764 T2 T/O 12 Process Stop Command Reply
F765 T2 T/O 13 Transfer Stop Command Reply
F766
F767
F768

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